Design, Modelling and Fabrication of a 40-330 Hz Dual-Mass MEMS Gyroscope on Thick-SOI Technology

摘要

This work reports the design, modelling, fabrication and preliminary functionality testing of a dual-mass MEMS vibratory gyroscope for application in medical instrumentation, among others. The two-framed gyro has drive and sense mode resonance frequencies of 2500Hz and 2830Hz, with its bandwidth tunable between 40-330Hz. Adopted design and technological features such as the use of double-folded springs, quadrature-error-compensation electrodes and 50?m thick-SOI mechanical layer enable high resolution sensing. The designed sensor characteristics have been validated using FEM simulation and equivalent circuit modelling.